Development of ferrite film facilitated high-performance on-chip inductors for GHz circuits

カテゴリ: 研究会(論文単位)

論文No: MAG14107

グループ名: 【A】基礎・材料・共通部門 マグネティックス研究会

発行日: 2014/08/07

タイトル(英語): Development of ferrite film facilitated high-performance on-chip inductors for GHz circuits

著者名: Sai Ranajit(Department of Electrical Engineering,Graduate School of Engineering),Bhat Navakanta(Centre for Nano Science and Engineering),Shivashankar S. A (Centre for Nano Science and Engineering)

著者名(英語): Sai Ranajit(Tohoku University,Sendai,Japan),Bhat Navakanta(Indian Institute of Science,Bangalore,India),Shivashankar S. A (Indian Institute of Science,Bangalore,India)

キーワード: ferrite|thin film|inductor|radio-frequency|inductance-density|CMOS-compatibility

要約(日本語): Integration of ferrite films on to the structures of on-chip RF inductor becomes essential for enhancement of inductance density. Here, we will demonstrate low-temperature deposition of ferrite film and its use to attain very high inductance density (680 nH/mm2 at 5 GHz and 450 nH/mm2 at 10 GHz).

要約(英語): Integration of ferrite films on to the structures of on-chip RF inductor becomes essential for enhancement of inductance density. Here, we will demonstrate low-temperature deposition of ferrite film and its use to attain very high inductance density (680 nH/mm2 at 5 GHz and 450 nH/mm2 at 10 GHz).

原稿種別: 日本語

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