An electromagnetically actuated translational micromirror for Fourier transform infrared spectroscopy

カテゴリ: 研究会(論文単位)

論文No: MAG20122,MSS20058

グループ名: 【A】基礎・材料・共通部門 マグネティックス/【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム合同研究会

発行日: 2020/12/24

タイトル(英語): An electromagnetically actuated translational micromirror for Fourier transform infrared spectroscopy

著者名: Ou Chuan-Hui(東北大学),NGUYEN Van Toan(東北大学),小野 崇人(東北大学)

著者名(英語): Chuan-Hui Ou(Tohoku University),Van Toan NGUYEN(Tohoku Uviversity),Takahito Ono(Tohoku Uviversity)

キーワード: MEMS|micromirror|FTIR|electromagnetic actuation|translation

要約(日本語): A micromirror driven by electromagnetic force for Fourier transform Infrared Spectroscopy was designed and fabricated. The micromirror was fabricated with MEMS technology and a commercial permanent magnet was mounted on it as the actuation material. A 279

要約(英語): A micromirror driven by electromagnetic force for Fourier transform Infrared Spectroscopy was designed and fabricated. The micromirror was fabricated with MEMS technology and a commercial permanent magnet was mounted on it as the actuation material. A 279 micrometers translational displacement was achieved. The maximum tilting angle was 9.4 degrees.

原稿種別: 英語

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