弾性変形を陽に考慮したゼロ速度領域におけるボールねじステージの高精度制御

カテゴリ: 研究会(論文単位)

論文No: MEC13162

グループ名: 【D】産業応用部門 メカトロニクス制御研究会

発行日: 2013/09/03

タイトル(英語): High-Precision Control for Ball-Screw-Driven Stage in Zero-Speed Region by Explicitly Considering Elastic Deformation

著者名: 朱 洪忠(東京大学),藤本 博志(東京大学)

著者名(英語): Zhu Hongzhong(The University of Tokyo),Fujimoto Hiroshi(The University of Tokyo)

キーワード: ボールねじステージ|精密制御|非線形摩擦補償|シグモイド関数|ball-screw-driven stage|precise motion control|friciton compensation|Sigmoid function

要約(日本語): Ball-screw-driven stages are extensively used in industry for high-precision fabrication thanks to the low cost and high efficiency. However, spring-like nonlinear friction in zero-speed crossing region significantly affects the control performance. In this paper, the mechanical deformation patterns at zero-speed point after slow deceleration and after fast deceleration are analyzed. It is shown that friction compensation methods in zero-speed region should take the elastic deformation patterns into account. Then, a new variable is defined to evaluate the variations of elastic deformation in the mechanical components. Finally, a novel friction compensation method for fast reverse motion using Sigmoid function is proposed to enhance the control performance by explicitly considering the elastic deformation, and the effectiveness is verified by experiments.

要約(英語): Ball-screw-driven stages are extensively used in industry for high-precision fabrication thanks to the low cost and high efficiency. However, spring-like nonlinear friction in zero-speed crossing region significantly affects the control performance. In this paper, the mechanical deformation patterns at zero-speed point after slow deceleration and after fast deceleration are analyzed. It is shown that friction compensation methods in zero-speed region should take the elastic deformation patterns into account. Then, a new variable is defined to evaluate the variations of elastic deformation in the mechanical components. Finally, a novel friction compensation method for fast reverse motion using Sigmoid function is proposed to enhance the control performance by explicitly considering the elastic deformation, and the effectiveness is verified by experiments.

原稿種別: 日本語

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