High-Precision Control of Ball-Screw-Driven Stages Considering Load-Side Rolling Friction

カテゴリ: 研究会(論文単位)

論文No: MEC14149

グループ名: 【D】産業応用部門 メカトロニクス制御研究会

発行日: 2014/09/01

タイトル(英語): High-Precision Control of Ball-Screw-Driven Stages Considering Load-Side Rolling Friction

著者名: 朱 洪忠(東京大学),藤本 博志(東京大学)

著者名(英語): Zhu Hongzhong(The University of Tokyo),Fujimoto Hiroshi(The University of Tokyo)

キーワード: ball-screw-driven stage|friction compensation

要約(日本語): Ball-screw-driven stages are extensively used in industry for high-precision fabrication thanks to the low cost and high efficiency. However, spring-like nonlinear frictions including the friction at the linear guide and the friction within screw and nut grooves can significantly degrade the control performance. In this paper, the effectiveness and imperfection of conventional friction compensation is firstly analyzed. Then, a novel friction compensation method considering load-side frictions is proposed to enhance the control performance. Simulations and experiments are also performed to evaluate the effectiveness of the proposed method.

要約(英語): Ball-screw-driven stages are extensively used in industry for high-precision fabrication thanks to the low cost and high efficiency. However, spring-like nonlinear frictions including the friction at the linear guide and the friction within screw and nut grooves can significantly degrade the control performance. In this paper, the effectiveness and imperfection of conventional friction compensation is firstly analyzed. Then, a novel friction compensation method considering load-side frictions is proposed to enhance the control performance. Simulations and experiments are also performed to evaluate the effectiveness of the proposed method.

原稿種別: 日本語

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