Logical gate circuits based on nanoelectromechanical switches

カテゴリ: 研究会(論文単位)

論文No: MSS17008

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会

発行日: 2017/06/30

タイトル(英語): Logical gate circuits based on nanoelectromechanical switches

著者名: ZHAO DONG(Tohoku university),NGUYEN VAN TOAN(Tohoku university),小野 祟人(Tohoku university)

著者名(英語): DONG ZHAO(Tohoku university),VAN TOAN NGUYEN(Tohoku university),Takahito Ono(Tohoku university)

キーワード: ｎａｎｏｅｌｅｃｔｒｏｍｅｃｈａｎｉｃａｌ　ｓｗｉｔｃｈｅ|ｌｏｇｉｃａｌ　ｇａｔｅ|nanoelectromechanical switche|logical gate

要約(日本語): Compact logical gate circuits based on nanoelectromechanical switches are designed, fabricated and evaluated. The switches consist of straight cantilevers, driving electrodes, and output electrodes. When different voltages are applied to the driving electrode and the cantilever, the cantilever will be driven by the electrical static force and the nanomechanical switch becomes ON state. The cantilevers are actuated in plane for achieving a high density and they are coated with tungsten for a low resistivity.One unit of the logical circuit is composed of four switches in which two switches work in series and other two switches work in parallel. The output signal of the logical circuit is recorded while the two inputs are applied to different pulse signal. This experiment exhibits the properties and feasibility of logical circuit based on nanoelectromechanical switches.

要約(英語): Compact logical gate circuits based on nanoelectromechanical switches are designed, fabricated and evaluated. The switches consist of straight cantilevers, driving electrodes, and output electrodes. When different voltages are applied to the driving electrode and the cantilever, the cantilever will be driven by the electrical static force and the nanomechanical switch becomes ON state. The cantilevers are actuated in plane for achieving a high density and they are coated with tungsten for a low resistivity.One unit of the logical circuit is composed of four switches in which two switches work in series and other two switches work in parallel. The output signal of the logical circuit is recorded while the two inputs are applied to different pulse signal. This experiment exhibits the properties and feasibility of logical circuit based on nanoelectromechanical switches.

原稿種別: 英語

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