Electromagnetically Actuated Quartz Glass Ring Resonator for Mode Matched Gyroscope

カテゴリ: 研究会(論文単位)

論文No: MSS20022

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会

発行日: 2020/07/06

タイトル(英語): Electromagnetically Actuated Quartz Glass Ring Resonator for Mode Matched Gyroscope

著者名: Khan Muhammad Jehanzeb(Tohoku University),Tsukamoto Takashiro(Tohoku University),Al Farisi Muhammad Salman(Tohoku University),Shuji Tanaka(Tohoku University)

著者名(英語): Muhammad Jehanzeb Khan(Tohoku University),Takashiro Tsukamoto(Tohoku University),Muhammad Salman Al Farisi(Tohoku University),Tanaka Shuji(Tohoku University)

要約(日本語): In this paper, we demonstrated a fabrication process of an electromagnetically-actuated quartz glass ring resonator with reduced anchorloss design finite element modelling (FEM) analysis. Two types of Au supporting structures are fabricated for temporary

要約(英語): In this paper, we demonstrated a fabrication process of an electromagnetically-actuated quartz glass ring resonator with reduced anchorloss design finite element modelling (FEM) analysis. Two types of Au supporting structures are fabricated for temporary and permanent support. Au-Au thermocompression bonding is used to bond quartz glass substrates at less than 400oC process temperature. The device layer is polished by chemical mechanical polishing (CMP) to 55 μm. Cr/Pt wires and pads are fabricated for electromagnetic actuation on the body of ring resonator. The quartz glass device layer is patterned using capacitively coupled plasma reactive ion etching (CCP-RIE). The Au sacrificial support structures are etched by time controlled Au wet etching. After successful fabrication, the ring resonator was driven electromagnetically at 42 KHz in wine glass mode for primary and secondary mode of ring resonator. The Q-factor under atmospheric pressure was recorded 142. The primary and secondary mode frequency difference was recorded as small as 603.9 Hz.

原稿種別: 英語

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