Fabrication and Characterization of Surface Covering Structures with MEMS-CMOS Integrated Tactile Sensor toward Practical Robot Applications

カテゴリ: 研究会(論文単位)

論文No: MSS20025

グループ名: 【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム研究会

発行日: 2020/07/06

タイトル(英語): Fabrication and Characterization of Surface Covering Structures with MEMS-CMOS Integrated Tactile Sensor toward Practical Robot Applications

著者名: Javaid Sumeyya(Tohoku University),Shao Chenzhong(Tohoku University),Hirano Hideki(Tohoku University),Muroyama Masanori(Tohoku Institute of Technology),Tanaka Shuji(Tohoku University)

著者名(英語): Sumeyya Javaid(Tohoku University),Chenzhong Shao(Tohoku University),Hideki Hirano(Tohoku University),Masanori Muroyama(Tohoku Institute of Technology),Shuji Tanaka(Tohoku University)

キーワード: CMOS-MEMS integrated tactile sensor|3-axis tactile sensor|covering material|covering structure|fabrication technology|robot applications|CMOS-MEMS integrated tactile sensor|3-axis tactile sensor|covering material|covering structure|fabrication technology|

要約(日本語): In this study, for practical robot applications surface covering structures were fabricated with three axis MEMS-CMOS integrated tactile sensor devices. Particular shape of the structure was considered and various materials were chosen based on hardness t

要約(英語): In this study, for practical robot applications surface covering structures were fabricated with three axis MEMS-CMOS integrated tactile sensor devices. Particular shape of the structure was considered and various materials were chosen based on hardness to develop the covering structure. The developed covered tactile sensors were evaluated on parameters of sensitivity, hysteresis, durability and contact force; shear force and normal force. Comparisons were successfully drawn and fine structure was chosen.

原稿種別: 英語

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