Electrofluidics fabricated by flexible metal patterning in glass microfluidic structures using femtosecond laser direct writing

カテゴリ: 研究会(論文単位)

論文No: OQD14009

グループ名: 【C】電子・情報・システム部門 光・量子デバイス研究会

発行日: 2014/03/07

タイトル(英語): Electrofluidics fabricated by flexible metal patterning in glass microfluidic structures using femtosecond laser direct writing

著者名: 徐 剣(理化学研究所),杉岡 幸次(理化学研究所),緑川 克美(理化学研究所)

著者名(英語): Jian Xu(RIKEN),Koji Sugioka(RIKEN),Katsumi Midorikawa(RIKEN)

キーワード: Metal patterning|microfluidic structures|femtosecond direct writing|electroless metal plating|microheater|biomicrochips

要約(日本語): We propose a simple and flexible strategy for metal patterning in glass microfluidic structures. First, we used the femtosecond laser direct writing combined with selective wet chemical etching to fabricate three-dimensional microfluidic structures in photosensitive glass. Then we employed femtosecond laser direct-write ablation to modify the internal walls of microfluidic structures in space-selective manner and metalized the ablated areas by the succeeding electroless plating process. The developed technique is used to fabricate electrofluidics in which microelectric components are integrated into microchannels. As one of the applications, microreactors based on integration of microheaters into microfluidic structures have been fabricated and used for enhancing chemical reactions in the channel. Moreover, electrical manipulation of aquatic microorganisms has been successfully demonstrated by integrating microelectrodes into microchannels.

要約(英語): We propose a simple and flexible strategy for metal patterning in glass microfluidic structures. First, we used the femtosecond laser direct writing combined with selective wet chemical etching to fabricate three-dimensional microfluidic structures in photosensitive glass. Then we employed femtosecond laser direct-write ablation to modify the internal walls of microfluidic structures in space-selective manner and metalized the ablated areas by the succeeding electroless plating process. The developed technique is used to fabricate electrofluidics in which microelectric components are integrated into microchannels. As one of the applications, microreactors based on integration of microheaters into microfluidic structures have been fabricated and used for enhancing chemical reactions in the channel. Moreover, electrical manipulation of aquatic microorganisms has been successfully demonstrated by integrating microelectrodes into microchannels.

原稿種別: 日本語

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