Technology and Applications of LSI-Integrated Microsensors

カテゴリ: 研究会(論文単位)

論文No: PHS08026

グループ名: 【E】センサ・マイクロマシン部門　フィジカルセンサ研究会

発行日: 2008/12/05

タイトル(英語): Technology and Applications of LSI-Integrated Microsensors

著者名: HidekuniTakao (ToyohashiUniversityofTechnology),KazuakiSawada (ToyohashiUniversityofTechnology),MakotoIshida (ToyohashiUniversityofTechnology)

著者名(英語): Hidekuni Takao(Toyohashi University of Technology),Kazuaki Sawada(Toyohashi University of Technology),Makoto Ishida(Toyohashi University of Technology)

キーワード: Microsensor|MEMS|CMOS|Integrated Circuits|Accelerometer|Microsensor|MEMS|CMOS|Integrated Circuits|Accelerometer

要約(英語): MEMS are harmonizing systems of micro-mechanics and microelectronics. Integrated micro-mechanical elements interact with various physical phenomena as sensors and actuators, while integrated electronics sense and control their motion and response. At pres

原稿種別: 日本語

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