Extreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography

カテゴリ: 研究会(論文単位)

論文No: PPT07044

グループ名: 【A】基礎・材料・共通部門　パルスパワー研究会

発行日: 2007/11/26

タイトル(英語): Extreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography

著者名: Majid Masnavi(Tokyo Institute of Technology),Mitsuo Nakajima(Tokyo Institute of Technology),Tohru Kawamura(Tokyo Institute of Technology),Eiki Hotta(Tokyo Institute of Technology),Kazuhiko Horioka(Tokyo Institute of Technology)

著者名(英語): Majid Masnavi(Tokyo Institute of Technology),Mitsuo Nakajima(Tokyo Institute of Technology),Tohru Kawamura(Tokyo Institute of Technology),Eiki Hotta(Tokyo Institute of Technology),Kazuhiko Horioka(Tokyo Institute of Technology)

キーワード: Extreme-ultraviolet lithography|Discharge-based plasmas|Conversion efficiency|Collisional-radiative model|Lyman-α line|Extreme-ultraviolet lithography|Discharge-based plasmas|Conversion efficiency|Collisional-radiative model|Lyman-α line

原稿種別: 日本語

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