Control and Confinement of Discharge-pumped-plasma for Efficient Extreme Ultraviolet Source

カテゴリ: 研究会(論文単位)

論文No: PST06067

グループ名: 【A】基礎・材料・共通部門　プラズマ研究会

発行日: 2006/08/07

著者名: K. Horioka (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),M. Shiho (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),E.. Hotta (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),T. Kawamura (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),M. Nakajimja (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),M. Masnavi (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),A. Okino (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),M. Watanabe (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),A. Kikuchi (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng),K. Takahashi (Department of Energy Sciences,Interdsciplinary Graduate School of Science and Englneerlng)

原稿種別: 日本語

PDFファイルサイズ: 709 Kバイト