Estimation of electron temperature and density of the decay plasma in a LADPP EUV source

カテゴリ: 研究会(論文単位)

論文No: PST11074

グループ名: 【A】基礎・材料・共通部門 プラズマ研究会

発行日: 2011/12/15

タイトル(英語): Estimation of electron temperature and density of the decay plasma in a LADPP EUV source

著者名: Zhu Qiushi(東京工業大学),武藤 敬宏(東京工業大学),山田 淳三郎(東京工業大学),岸 望(東京工業大学),渡辺 正人(東京工業大学),沖野 晃俊(東京工業大学),堀岡 一彦(東京工業大学),堀田 栄喜(東京工業大学)

著者名(英語): Zhu Qiushi(Tokyo Institute of Technology),Muto Takahiro(Tokyo Institute of Technology),Yamada Junzaburo(Tokyo Institute of Technology),Kishi Nozomu(Tokyo Institute of Technology),Watanabe Masato(Tokyo Institute of Technology),Okino Akitoshi(Tokyo Institute of Technology),Horioka Kazuhiko(Tokyo Institute of Technology),Hotta Eiki(Tokyo Institute of Technology)

キーワード: 13.5 nm EUV source|LADPP/LDP|Vacuum arc|Stark broadening|electron density|electron temperature

要約(日本語): An intersection Stark broadening method was developed to experimentally investigate the plasma decay behaviors and the electrical recovery process in our tin fueled laser assisted discharge produced plasma (LADPP) 13.5 nm EUV source. Spatial-resolved evolutions electron temperature Te and density ne of the expansion plasma during 50-900 ns after the maximum implosion were obtained. According to the different ne decay characteristics along the Z-pinch axis, the expansion velocity of the electrons was estimated to be ~1.2×10^4 m/s from the plasma shell in between the electrodes towards both cathode and anode. The decay time constant of ne was measured to be 183±24 ns. Based on the theories of the plasma adiabatic expansion and the electron-impact ionization, the minimum time-span that electrical recovery between the electrodes needs to guarantee the next succeeding regular EUV-emitting discharge is estimated to be 70 μs. Therefore, the maximum repetition rate of our LADPP EUV source is about 14 kHz.

原稿種別: 日本語

PDFファイルサイズ: 1,427 Kバイト