プレーナ型Metal-Semiconductor-Metal構造における空乏層の光音響信号測定

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2011/06/01

タイトル(英語): Measurement of Photoacoustic Signals of Depletion Layer in Planar Metal-Semiconductor-Metal Structure

著者名: 村上　雅彦（神奈川工科大学工学部電気電子情報工学科），高畠　信也（神奈川工科大学創造工学部ホームエレクトロニクス開発学科），佐藤　和紀（東海大学情報理工学部コンピュータ応用工学科），荒井　俊彦（神奈川工科大学工学部電気電子情報工学科）

著者名(英語): Masahiko Murakami (Department of Electrical and Electronic Engineering, Faculty of Engineering, Kanagawa Institute of Technology), Nobuya Takabatake (Department of Home Electronics, Faculty of Creative Engineering, Kanagawa Institute of Technology), Kazunori Sato (Department of Applied Computer Engineering, School of Information Science and Technology, Tokai University), Toshihiko Arai (Department of Electrical and Electronic Engineering, Faculty of Engineering, Kanagawa Institute of Technology)

キーワード: 光音響法，温度波，空乏層，MSM構造，ショットキー障壁，光電流　　photoacoustic (PA) method，thermal-wave，depletion layer，metal-semiconductor-metal (MSM) structure，schottky barrier，photocurrent

要約(英語): The photoacoustic signal from the depletion layer was detected using the photoacoustic method formed within a planar metal-semiconductor-metal (MSM) structure. To measure the distribution of the photoacoustic signal from the depletion layer, the surface of the sample was illuminated and scanned by an intensity-modulated optical-beam. The amplitude and phase shifts of the observed signal increased with an increase in the reverse bias in the Schottky-barrier. The intensity distribution of the photoacoustic signal corresponded closely to the position of the photocurrent distribution showing the presence of the depletion layer measured by the photoelectric method. This demonstrates clearly that the photoacoustic signal reflects the presence of the depletion layer in semiconductor materials, and that the photoacoustic method can be used effectively for visualization of the depletion layer.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.131 No.6 （2011） 特集：電気電子絶縁材料システムシンポジウム

本誌掲載ページ: 447-451 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/131/6/131_6_447/_article/-char/ja/