TiO2薄膜へのW層付与による光機能特性の改善

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2011/11/01

タイトル(英語): Improvement of Photo-functional Properties of TiO2 Thin Film Coated by W Surface Layer

著者名: （工学院大学），佐藤　光史（工学院大学），鷹野　一朗（工学院大学）

著者名(英語): Haider A. Shukur (Kogakuin University), Mitsunobu Sato (Kogakuin University), Ichiro Takano (Kogakuin University)

キーワード: TiO2薄膜，W付与，反応性スパッタリング，光機能特性　　TiO2 thin film，W coating，reactive sputtering，photo-functional property

要約(英語): TiO2 thin films with a W layer to improve photo-functional properties were prepared by a reactive magnetron sputtering method. The W thin layers with 0.4-2.5 nm in thickness were coated onto the TiO2 thin film by the same magnetron sputtering. The surface chemical state of the W coated TiO2 thin films measured by X-ray photoelectron spectroscopy showed W metal or/and W oxide on the TiO2 thin film. A spectrophotometer was used to investigate UV-Vis absorption of the W coated TiO2 thin films which absorb energy of longer wavelength than the TiO2 thin film without the W surface layer. Visible-ray photocatalysis of the W coated TiO2 thin films was improved by 4 points in the sample with W layer thickness of 1.7 nm and photoconductivity was improved by four times under artificial sun light. It was proved that these improvements of phot-functional properties was achieved by different cause.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.131 No.11 （2011）

本誌掲載ページ: 955-960 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/131/11/131_11_955/_article/-char/ja/