オカモトキャビティーによる非金属元素分析用ヘリウム大気圧マイクロ波誘導プラズマ

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2012/07/01

タイトル(英語): Helium Microwave-Induced Plasma at Atmospheric Pressure Generated by Okamoto Cavity for Nonmetal Analysis

著者名: 岡本　哲（ウシオ電機（株） 技術部開発課），岡本　幸雄（東洋大学 工業技術研究所）

著者名(英語): Tetsu Okamoto (Development Section, NSH-Business Unit, Ushio Inc.), Yukio Okamoto (Research Institute of Industrial Technology, Toyo University)

キーワード: ヘリウム大気圧マイクロ波誘導プラズマ，オカモトキャビティー，非金属元素分析，原子発光分光分析法　　helium atmospheric pressure microwave-induced plasma，Okamoto cavity，nonmetal analysis，atomic emission spectrometry

要約(英語): Helium microwave-induced plasma (He-MIP) for nonmetal elements analysis was generated by a 2.45 GHz microwave power (∼1 kW) with the Okamoto cavity of the surface wave mode at atmospheric pressure. Effects of the main parameters of the cavity such as a thickness (direction of the electric field) of the cavity, the width of a ring-slot and the position of a discharge tube (torch) on an excitation temperature and the analytical signals were investigated. The excitation temperature and an electron density of the plasma as a parameter of the microwave power, and the plasma and carrier gas flow rates were measured. With 600 watt input microwave power, the excitation temperature of high energy part of 7000 K and the electron density of 2.4×1014/cm3 were obtained. An aqueous solution of NaF was introduced into the center of the annular He-MIP and the F I (685 nm, 14.5 eV) signal was detected, and the effects of microwave power and the gas flow rates on the signal were studied. The detection limit of 60 ppb for fluorine was obtained.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.132 No.7 （2012） 特集：The 16th International Workshop on Spherical Tori 2011

本誌掲載ページ: 580-586 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/132/7/132_580/_article/-char/ja/