電子ビームの単パルス照射による無酸素銅からの電子衝撃脱離ガス分析

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2012/11/01

タイトル(英語): Analysis of Desorbed Gases from Oxygen-free Copper Stimulated by Irradiation with Single Pulsed Electron Beam

著者名: 金子　広樹（埼玉大学），山納　康（埼玉大学），小林　信一（埼玉大学），齊藤　芳男（高エネルギー加速器研究機構）

著者名(英語): Hiroki Kaneko (Saitama University), Yasushi Yamano (Saitama University), Shinichi Kobayashi (Saitama University), Yoshio Saito (High Energy Accelerator Research Organization)

キーワード: 真空，真空中放電，脱離ガス，電子衝撃脱離　　vacuum，discharge in vacuum，desorbed gas，electron stimulated desorption

要約(英語): Desorbed gases from anode stimulated by electron irradiation are regarded as one of causes leading to vacuum breakdown. To understand the vacuum breakdown phenomena, it is important to analyze composition and quantity of electron stimulated desorption gases. Single pulsed electron beam irradiation method was developed for the detailed analysis of the desorbed gas characteristics. It is possible for this method to reduce the modification of surface condition due to electron beam irradiation and enables to measure the transition of gas desorption rate from the virgin surface state to a certain period. Using this method, we investigated the desorbed gases from oxygen-free copper electrode. It was found that electron irradiation caused H2 gas desorption from copper electrode and the conditioning of the gas desorption. Moreover, a large amount of H2 gas was desorbed when the first electron beam was irradiated. By using desorbed gases analysis method stimulated by irradiation with single pulsed electron beam, it is possible to observe change of gas desorption rate from virgin surface to a certain number of electron irradiated surface state. Analyzing desorbed gas from the sample in detail can evaluate the electrode material in vacuum.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.132 No.11 （2012） 特集：放電現象・新素材とその応用技術

本誌掲載ページ: 951-957 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/132/11/132_951/_article/-char/ja/