テラヘルツ波を用いた誘電体の表面粗さ測定

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2015/08/01

タイトル(英語): Measurement of Surface Roughness of Dielectric Materials using Terahertz Waves

著者名: 福地　哲生（（一財）電力中央研究所 電力技術研究所），布施　則一（（一財）電力中央研究所 電力技術研究所），水野　麻弥（（独）情報通信研究機構 電磁波計測研究所），福永　香（（独）情報通信研究機構 電磁波計測研究所）

著者名(英語): Tetsuo Fukuchi (Central Research Institute of Electric Power Industry), Norikazu Fuse (Central Research Institute of Electric Power Industry), Maya Mizuno (National Institute of Information and Communications Technology), Kaori Fukunaga (National Institute of Information and Communications Technology)

キーワード: テラヘルツ波，誘電体，表面粗さ，反射率，周波数特性，アルミナ　　terahertz wave，dielectric material，surface roughness，reflectivity，frequency characteristics，alumina

要約(英語): The surface roughness of sandpaper specimens with alumina abrasive was measured based on the effective reflectivity of terahertz waves. Measurement results based on the frequency dependence of the effective reflectivity were in agreement with measurement results using a contact surface roughness gauge to within 10% for surface roughness 10-35 µm. In addition, the frequency-averaged effective reflectivity was calculated with the surface roughness as a parameter. This provided a calibration curve to convert the measured frequency-averaged effective reflectivity to surface roughness. Measurement results based on the frequency-averaged effective reflectivity were in agreement with measurement results using a contact surface roughness gauge for surface roughness below 25 µm. The effect of the paint layer coating the abrasive did not result in significant error. The results showed that terahertz waves can be used for noncontact measurement of the surface roughness of dielectric surfaces.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.135 No.8 （2015）

本誌掲載ページ: 450-455 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/135/8/135_450/_article/-char/ja/