ソフトリソグラフィによる誘電体ピラーを利用した3次元誘電泳動効果

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2015/09/01

タイトル(英語): Three-dimensional Dielectrophoresis with Dielectric Pillar Arrays Fabricated by Soft Lithography

著者名: 渡部　涼（芝浦工業大学工学部電気工学科）,内田　諭（首都大学東京大学院理工学研究科電気電子工学専攻）,西川　宏之（芝浦工業大学工学部電気工学科）

著者名(英語): Ryo Watabe (Dept. of Electrical Engineering, Shibaura Institute of Technology), Satoshi Uchida (Graduate School of Science and Engineering, Tokyo Metropolitan University), Hiroyuki Nishikawa (Dept. of Electrical Engineering, Shibaura Institute of Technology)

キーワード: Proton Beam Writing,Dielectrophoresis,ソフトリソグラフィ　　proton beam writing,dielectrophoresis,soft lithography

要約(英語): We studied 3D dielectrophoretic (DEP) effects induced by dielectric pillar arrays fabricated by soft lithography. Polydimethylsiloxane (PDMS) was casted onto a PMMA mold with arrays of high-aspect-ratio holes micromachined by proton beam writing (PBW), which is a novel direct-write lithographic technique using a scanning proton beam. Arrays of PDMS pillars with diameter of ∼3 µm and a height of ∼15 µm, were fabricated using the soft lithography. The 3D-DEP effect was demonstrated using the PDMS pillar arrays incorporated into a channel on a glass substrate by measuring a trapping capability of E. coli. Coupled use of the soft lithgraphy with the PBW enables us to fabricate low-cost 3D-DEP devices with improved throughput.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.135 No.9 （2015）

本誌掲載ページ: 548-552 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/135/9/135_548/_article/-char/ja/