An Overview on the Sensitivity of Electro-Acoustic-Reflectometry (EAR) Method
An Overview on the Sensitivity of Electro-Acoustic-Reflectometry (EAR) Method
カテゴリ: 論文誌(論文単位)
グループ名: 【A】基礎・材料・共通部門
発行日: 2019/02/01
タイトル(英語): An Overview on the Sensitivity of Electro-Acoustic-Reflectometry (EAR) Method
著者名: Louiza Hamidouche (Laboratoire de Physique et d'Etude des Materiaux (LPEM), ESPCI-Paris, Sorbonne Universite, CNRS), Stephane Hole (Laboratoire de Physique et d'Etude des Materiaux (LPEM), ESPCI-Paris, Sorbonne Universite, CNRS), Emmanuel Geron (Laboratoi
著者名(英語): Louiza Hamidouche (Laboratoire de Physique et d'Etude des Materiaux (LPEM), ESPCI-Paris, Sorbonne Universite, CNRS), Stephane Hole (Laboratoire de Physique et d'Etude des Materiaux (LPEM), ESPCI-Paris, Sorbonne Universite, CNRS), Emmanuel Geron (Laboratoire de Physique et d'Etude des Materiaux (LPEM), ESPCI-Paris, Sorbonne Universite, CNRS)
キーワード: space charge,spatial resolution,microwave system,reflection coefficient,sensitivity
要約(英語): This article is an overview on the sensitivity of the recently introduced EAR method for the measurement of space charge in thin dielectric films. Its principle is first recalled then an investigation of its sensitivity is made. It is shown that when the bandwidth of the network analyzer is 10 Hz, a signal-to-noise ratio above 50 is obtained even with an excitation as low as -50 dBm.
本誌掲載ページ: 99-104 p
原稿種別: 論文/英語
電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/139/2/139_99/_article/-char/ja/
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