準大気圧高繰り返しナノ秒パルスヘリウムグロー放電発光の時空間分解計測

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2019/07/01

タイトル(英語): Spatio-temporal Resolved Measurements of Optical Emission Intensities of a High-repetition Nanosecond Pulsed Helium Glow Discharge Under Sub-atmospheric Pressure

著者名: 前川　拓也（兵庫県立大学工学研究科），菊池　祐介（兵庫県立大学工学研究科），西村　芳実（（株）栗田製作所），八束　充保（兵庫県立大学工学研究科）

著者名(英語): Takuya Maegawa (Graduate School of Engineering, University of Hyogo), Yusuke Kikuchi (Graduate School of Engineering, University of Hyogo), Yoshimi Nishimura (Kurita Seisakusyo Co. Ltd.), Mitsuyasu Yatsuzuka (Graduate School of Engineering, University of Hyogo)

キーワード: 高繰り返しナノ秒パルス電圧，グロー放電，準大気圧，ヘリウムプラズマ，アフターグロー　　high-repetition nanosecond pulsed voltage，glow discharge，sub-atmospheric pressure，helium plasma，afterglow

要約(英語): Dynamic behaviors of a high-repetition nanosecond pulsed helium glow discharge under a gas pressure of 10 kPa were investigated. In particular, spatio-temporal resolved measurements of optical emission intensities of the discharge were performed using an intensified CCD (ICCD) camera. The pulsed glow discharge was produced in a pair of parallel plate metal electrodes using a recently developed SiC-MOSFET inverter power supply, where repetition frequencies of the applied pulsed voltage were 20 and 600 kHz. The results showed that the discharge was volumetrically produced in the electrode gap at 20 kHz, whereas the discharge was localized at the cathode surface at 600 kHz. It was shown that the optical emission of the discharge at 600 kHz appeared through the whole area of the cathode surface during the afterglow period.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.139 No.7 （2019）

本誌掲載ページ: 319-325 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/139/7/139_319/_article/-char/ja/