MOD法により作製したV0.75Ti0.25O2ボロメータ薄膜の特性評価

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2021/03/01

タイトル(英語): Evaluation of V0.75Ti0.25O2 Bolometer Thin Films Fabricated by MOD

著者名: 藤城　雄飛（防衛大学校 電気電子工学科），河原　正美（（株）高純度化学研究所），佐村　剛（（株）高純度化学研究所），立木　隆（防衛大学校 電気電子工学科），内田　貴司（防衛大学校 電気電子工学科）

著者名(英語): Yuhi Fujishiro (National Defense Academy), Masami Kawahara (Kojundo Chemical Laboratory Co., Ltd.), Tsuyoshi Samura (Kojundo Chemical Laboratory Co., Ltd.), Takashi Tachiki (National Defense Academy), Takashi Uchida (National Defense Academy)

キーワード: 有機金属分解(MOD)法，チタンドープ二酸化バナジウム，炭素熱還元，ボロメータ薄膜　　metal-organic decomposition (MOD)，Ti-doped vanadium dioxide，carbon thermal reduction，bolometer thin film

要約(英語): Ti-doped vanadium dioxide (V0.75Ti0.25O2) thin films were fabricated by metal-organic decomposition (MOD). Precursor films were fabricated at a temperature of Tp = 300 ℃ for 15 min in a N2 atmosphere. Then, these precursor films were fired at Tf = 520～600 ℃ for tf = 15～45 min in a N2 atmosphere. From X-ray diffraction (XRD) patterns of the fired films, diffraction peaks indicating VO2(M) phase were observed with a wide range of Tf = 540～600 ℃. Furthermore, the peaks indicating VO2(M) phase were also observed with a wide range of tf = 15～45 min. Regarding the surface morphology of the films, the nanoparticles of 100～200 nm were densely packed. From R-T characteristics of the films, the phase transition with a rapid resistance change and hysteresis loop disappeared completely at Tf = 560～600 ℃. Relatively flat temperature dependence of the temperature coefficients of resistance (TCR) as high as -3.2～-6.2 %/K at the temperature range from 20 ℃ to 80 ℃ was obtained for the film fired at Tf = 580 ℃. From these experimental results, it was found that wide windows of firing conditions for fabricating V0.75Ti0.25O2 thin film can be obtained in the MOD process.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.141 No.3 （2021） 特集：放電・プラズマ・パルスパワー研究の最新動向

本誌掲載ページ: 197-201 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/141/3/141_197/_article/-char/ja/