静電気力顕微鏡のセンサにおける静電気力検出感度によるセンサ先端―測定面距離自動制御

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2021/06/01

タイトル(英語): Automatic Distance Controlling System between Sensor Tip and Sample under Test for Electrostatic Force Microscopy

著者名: 西口　義和（日本大学大学院理工学研究科），東尾　順平（ゼネラル物産（株）），上原　利夫（日本大学理工学部），芦澤　好人（日本大学理工学部），中川　活二（日本大学理工学部）

著者名(英語): Yoshikazu Nishiguchi (Graduate School of College of Science and Technology, Nihon University), Junpei Higashio (General Bussan Co., LTD), Toshio Uehara (College of Science and Technology, Nihon University), Yoshito Ashizawa (College of Science and Technol

キーワード: 表面電位計，静電気力顕微鏡，距離自動制御　　surface voltage measurement，electrostatic force microscopy，automatic distance control

要約(英語): An electrostatic force microscopy (EFM) is a highly effective system for a measurement of surface voltage distribution. We have been working on the development of the EFM which enables to measure surface voltage in the range from +/-0.1 V up to +/-2 kV with a high spatial resolution better than 10 μm in diameter under atmospheric environment. The EFM is able to scan a wide area larger than tens of mm. However, since the EFM employs a non-contacting measurement method and we expect a wide scanning range as well, the distance between a sensor tip (ST) and a sample under test (SUT) is always a very critical issue. We have successfully developed a new methodology with which we can always keep an equal distance d between ST and SUT automatically throughout a measurement process. Since the EFM also employs a field nullification technology for the electric field between ST and SUT, the EFM keeps monitoring the voltage difference between ST and SUT. This methodology utilizes the information of aforementioned voltage difference for controlling the distance to be always equal. We have confirmed that we can control the d with a resolution as good as 1 μm throughout a measurement.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.141 No.6 （2021） 特集：電気電子工学関連分野における教育フロンティア

本誌掲載ページ: 373-378 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/141/6/141_373/_article/-char/ja/