近磁界プローブの等価回路を用いたESD過渡磁界の波形換算と検証

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2021/11/01

タイトル(英語): Waveform Conversion and Validation of Transient Magnetic Field due to ESD using Equivalent Circuit of Magnetic Near-field Probe

著者名: 王　建青（名古屋工業大学大学院 電気・機械工学専攻），川又　憲（東北学院大学情報基盤工学科），石上　忍（東北学院大学情報基盤工学科），石田　武志（（株）ノイズ研究所），藤原　修（（株）ノイズ研究所／電気通信大学 産学官連携センター）

著者名(英語): Jiaqing Wang (Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology), Ken Kawamata (Department of Electronic Engineering, Tohoku Gakuin University), Shinobu Ishigami (Department of Electronic Engineering, Tohoku Gakuin Univer

キーワード: ESD過渡磁界，近磁界プローブ，等価回路，波形換算，検証　　ESD transient magnetic field，magnetic near-field probe，equivalent circuits，waveform conversion，validation

要約(英語): With a 6 GHz band high resolution magnetic near-field probe (XF-R 3-1) produced by Langer, the transient magnetic fields due to collision ESDs (electrostatic discharges) between metal balls at a charging voltage of 600 V were measured near the spark point to investigate a dipole radiation mechanism. In this study, as an object of considering the measured magnetic field waveforms, two different equivalent circuits of the magnetic near-field probe are derived based on the probe response waveform observed by a TDR (time domain reflectometer) with a 10 ps rise-time pulse and the probe reflection coefficient measured with a 26 GHz network analyzer. Waveform conversion formulae from the probe output voltage to the magnetic field are given. The validity of the conversion methods is verified by comparing the measured conversion waveforms and their frequency spectra in addition to the converted spectra by the Langer field correction curve with the calculated waveforms of the transient magnetic far-fields from a dipole model consisting of image charge pairs and the Rompe-Weizel spark resistance formula. The probe conversion formulae presented here are valid within the frequency range of the 6 GHz probe band, however, beyond the band the resonance peaks at multiple frequencies over 8 GHz appear on the spectra, which causes damping oscillations peculiar to the probe with multiple frequencies to the time domain waveform.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.141 No.11 （2021）

本誌掲載ページ: 606-614 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/141/11/141_606/_article/-char/ja/