大気圧アルゴンプラズマジェットI－可視域発光スペクトルと真空紫外光の空間分布測定－

カテゴリ: 論文誌(論文単位)

グループ名: 【A】基礎・材料・共通部門

発行日: 2023/12/01

タイトル(英語): Atmospheric Pressure Argon Plasma Jets I－Measurements of Spatial Distribution for Visible Emission Spectrum and Vacuum Ultraviolet－

著者名: 鈴木　進（千葉工業大学），寺西　研二（徳島大学），伊藤　晴雄（千葉工業大学）

著者名(英語): Susumu Suzuki (Chiba Institute of Technology), Kenji Teranishi (Tokushima University), Haruo Itoh (Chiba Institute of Technology)

キーワード: 大気圧アルゴンプラズマジェット，発光スペクトル，真空紫外光，空間分布　　atmospheric argon plasma jet，emission spectrum，vacuum ultra violet，spatial distribution

要約(英語): This paper describes the observed position dependent emission spectrum and vacuum ultraviolet (VUV) to clarify the optical structure of argon atmospheric pressure plasma jets (APJs). Visible emission spectra of argon, nitrogen and OH molecules were measured as a function of position from the nozzle of plasma jet generator to gas flow direction. From the results, we realized that a certain electric field is required for producing high energy excited atoms of argon in the jet from the high voltage electrode in the device to the ground positioned at downstream side. Moreover, VUV was detected along the plasma jet through the downstream direction. Thus, we could picture that the light pattern of plasma jet of which intensity weaken depend to the distance from the nozzle is sustained by the above two factors with the present steady state experiments.

本誌: 電気学会論文誌A（基礎・材料・共通部門誌） Vol.143 No.12 （2023）

本誌掲載ページ: 366-373 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejfms/143/12/143_366/_article/-char/ja/