横波型弾性表面波を用いた液相系センサ

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/06/01

タイトル(英語): Liquid-Phase Sensor Using Shear Horizontal Surface Acoustic Wave Devices

著者名: 近藤　淳（静岡大学創造科学技術大学院）

著者名(英語): Jun Kondoh (Graduate School of Science and Technology, Shizuoka University)

キーワード: 横波型弾性表面波，液相系センサ，機械的摂動，電気的摂動，感度比較　　shear horizontal surface acoustic wave (SH-SAW)，liquid-phase sensor，mechanical perturbation，electrical perturbation，comparison of sensor sensitivity

要約(英語): A surface acoustic wave (SAW) is perturbed from physical and/or chemical changes of an adjacent medium. If a liquid-phase sensor is realized, a shear horizontal SAW (SH-SAW) must be used. The SH-SAW sensors been investigated since 1987. Measuring objects of the SH-SAW sensor are not only immunoreactions but also liquid properties. Feature of the SH-SAW sensor is simultaneous detection of mechanical and electrical properties of liquid. In this paper, first, theory of the SH-SAW sensor is described. Then experimental results using the SH-SAW sensor on 36YX-LiTaO3 are introduced. Also, the sensor sensitivities of the SH-SAW sensors which are fabricated on piezoelectric substrates are theoretically compared.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.6 （2011） 特集：圧電材料・デバイス

本誌掲載ページ: 1094-1100 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/6/131_6_1094/_article/-char/ja/