逆プロトン交換10°Y-X LiNbO3基板上の漏洩弾性表面波の伝搬特性

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/06/01

タイトル(英語): Propagation Properties of Leaky Surface Acoustic Wave on Reverse-Proton-Exchanged 10°Y-X LiNbO3

著者名: 垣尾　省司（山梨大学大学院医学工学総合研究部），清水　秀徳（山梨大学大学院医学工学総合研究部），中川　恭彦（山梨大学名誉教授）

著者名(英語): Shoji Kakio (Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi), Hidenori Shimizu (Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi), Yasuhiko Nakagawa (Professor emeritus, University of Yamanashi)

キーワード: 漏洩弾性表面波，伝搬減衰，逆プロトン交換法，LiNbO3　　Leaky surface acoustic wave，Attenuation，Reverse-proton-exchange process，LiNbO3

要約(英語): In this study, to reduce the leaky surface acoustic wave (LSAW) attenuation, a layered structure of air/bulk LiNbO3(LN) layer/elastically softened LN substrate which can be fabricated by a reverse proton exchange (RPE) process was applied to 10° Y-X LN with a larger coupling factor. First, the LSAW attenuation on a structure of air/bulk LN/modified LN was calculated when all material constants of the buried proton exchange (PE) layer were taken into consideration. It was found that the condition in which the attenuation decreases as compared with the bulk value exists for the free and metallized surfaces. Next, the LSAW propagation properties were measured using IDT pairs with 3.6μm wavelength on 10°Y-X LN with the RPE layer and the buried PE layer. The propagation loss PL for the metallized surface was decreased by carrying out the RPE process from 0.44dB/λ of a virgin wafer to 0.01dB/λ. The decrease in PL for the shorted grating was also observed.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.6 （2011） 特集：圧電材料・デバイス

本誌掲載ページ: 1131-1137 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/6/131_6_1131/_article/-char/ja/