SAWフィルタにおける電極構造と耐電力性の温度および印加電力依存性

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/06/01

タイトル(英語): The Power Durability Dependence on Temperature, Input Power and Structure of Electrodes in SAW Filter

著者名: 高山　了一（パナソニックエレクトロニックデバイス（株）），中西　秀和（パナソニックエレクトロニックデバイス（株））

著者名(英語): Ryoichi Takayama (Panasonic electronic Device Co., Ltd.), Hidekazu Nakanishi (Panasonic electronic Device Co., Ltd.)

キーワード: SAWフィルタ，耐電力性，4層電極，加速劣化試験，活性化エネルギー　　SAW filter，Power durability，4-layerd electrode，acceleration test，activation energy

要約(英語): The dependence of power durability on temperature and input power has been studied in detail by using SAW filter with AlMgCu/Ti/AlMgCu/Ti 4-layered electrodes. In case of SAW filters, acceleration factors of degradation are temperature and input power. These 2 factors are not independent in actual SAW filters, but it is necessary to control the condition to keep the independency of these 2 factors in accelerated deterioration test. As the results of power durability estimation of 4-layered electrodes which had done in consideration of the point above, the activation energy of diffusion showed value of bulk diffusion level in the test using 800MHz band filters, and the dependence of input power was increase in proportion to the frequency of input power. Additionally, we successfully improved power durability of 4-layered electrodes by modifying the layered structure and increasing Mg content in AlMgCu alloy layers. In the former case, the dependency of input power didn't change but the absolute level against input power was improved. On the other hand, the dependency of input power and the absolute level against input power didn't change but the dependence of temperature is increase in the latter case.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.6 （2011） 特集：圧電材料・デバイス

本誌掲載ページ: 1138-1143 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/6/131_6_1138/_article/-char/ja/