高温相水晶の共振特性と温度センサへの応用

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/06/01

タイトル(英語): Temperature Characteristics of β-phase Quartz Resonators and Their Application to Accurate Temperature Sensors in High Temperature Region

著者名: 宇野　武彦（神奈川工科大学電気電子情報工学科），田代　博之（神奈川工科大学電気電子情報工学科），野毛　悟（沼津工業高等専門学校電気電子工学科）

著者名(英語): Takehiko Uno (Kanagawa Inst. Tech.), Hiroyuki Tashiro (Kanagawa Inst. Tech.), Satoru Noge (Numazu National College of Tech.)

キーワード: 水晶，高温相，圧電特性，温度センサ　　Quartz，β-phase，piezoelectric characteristics，temperature sensor

要約(英語): Quartz has been widely used for resonators and filters because of its excellent electromechanical characteristics. Quartz has a transition temperature, TC, at 573℃. The electromechanical characteristics of quartz have been well investigated for α-phase (below TC), however the characteristics in β-phase have not been well clarified. We investigated the piezoelectric properties of β-quartz plates from 573℃ to about 1,300℃. Clear piezoelectric resonances with high quality factors were observed. By using the large frequency temperature coefficient, β-phase quartz can be applicable to temperature sensors in high temperature region above 600℃. We proposed also an unwired set-up using the β-phase quartz temperature sensor.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.6 （2011） 特集：圧電材料・デバイス

本誌掲載ページ: 1150-1157 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/6/131_6_1150/_article/-char/ja/