MEMSエレクトレット・コンデンサ・マイクロホンによる脈波測定

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/09/01

タイトル(英語): Human Pulse Wave Measurement by MEMS Electret Condenser Microphone

著者名: 野村　収作（長岡技術科学大学），花坂　康志（長岡技術科学大学），石黒　隆（太陽誘電（株）），小川　博司（ビフレステック（株））

著者名(英語): Shusaku Nomura (Nagaoka University of Technology), Yasushi Hanasaka (Nagaoka University of Technology), Tadashi Ishiguro (TAIYO YUDEN Co., Ltd.), Hiroshi Ogawa (Bifrostec Inc.)

キーワード: 脈波，MEMS，ECM，シリコンマイクロホン　　pulse wave，MEMS，ECM，silicon microphone

要約(英語): A micro Electret Condenser Microphone (ECM) fabricated by Micro Electro Mechanical System (MEMS) technology was employed as a novel apparatus for human pulse wave measurement. Since ECM frequency response characteristic, i.e. sensitivity, logically maintains a constant level at lower than the resonance frequency (stiffness control), the slightest pressure difference at around 1.0Hz generated by human pulse wave is expected to detect by MEMS-ECM. As a result of the verification of frequency response of MEMS-ECM, it was found that -20dB/dec of reduction in the sensitivity around 1.0Hz was engendered by a high input-impedance amplifier, i.e. the field effect transistor (FET), mounted near MEMS chip for amplifying tiny ECM signal. Therefore, MEMS-ECM is assumed to be equivalent with a differentiation circuit at around human pulse frequency. Introducing compensation circuit, human pulse wave was successfully obtained. In addition, the radial and ulnar artery tracing, and pulse wave velocity measurement at forearm were demonstrated; as illustrating a possible application of this micro device.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.9 （2011） 特集：医療・ヘルスケアにおける工学技術の新展開

本誌掲載ページ: 1553-1558 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/9/131_9_1553/_article/-char/ja/