多次元空間におけるモデルベースド欠陥検出

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2011/09/01

タイトル(英語): Model Based Defect Detection in Multi-Dimensional Vector Spaces

著者名: 本田　敏文（日立製作所　横浜研究所），小原　健二（日立ハイテクノロジーズ），原田　実（日立製作所　横浜研究所），五十嵐　一（北海道大学　大学院　情報科学研究科）

著者名(英語): Toshifumi Honda (Yokohama Research Laboratory, Hitachi, Ltd.), Kenji Obara (Hitachi-High-Technologies), Minoru Harada (Yokohama Research Laboratory, Hitachi, Ltd.), Hajime Igarashi (Information Science and Technology, Hokkaido University)

キーワード: 画像処理，欠陥検出，SEM，検査，固有空間　　image processing，defect detection，SEM，inspection，eigenspace

要約(英語): A highly sensitive inspection algorithm is proposed that extracts defects in multidimensional vector spaces from multiple images. The proposed algorithm projects subtraction vectors calculated from test and reference images to control the noise by reducing the dimensionality of vector spaces. The linear projection vectors are optimized using a physical defect model, and the noise distribution is calculated from the images. Because the noise distribution varies with the intensity or texture of the pixels, the target image is divided into small regions and the noise distribution of the subtraction images are calculated for each divided region. The bidirectional local perturbation pattern matching (BD-LPPM) which is an enhanced version of the LPPM, is proposed to increase the sensitivity when calculating the subtraction vectors, especially when the reference image contains more high-frequency components than the test image. The proposed algorithm is evaluated using defect samples for three different scanning electron microscopy images. The results reveal that the proposed algorithm increases the signal-to-noise ratio by a factor of 1.32 relative to that obtained using the Mahalanobis distance algorithm.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.131 No.9 （2011） 特集：医療・ヘルスケアにおける工学技術の新展開

本誌掲載ページ: 1633-1641 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/131/9/131_9_1633/_article/-char/ja/