商品情報にスキップ
1 1

弾性表面波駆動の流体アクチュエータを用いた高効率混合チップ

弾性表面波駆動の流体アクチュエータを用いた高効率混合チップ

通常価格 ¥770 JPY
通常価格 セール価格 ¥770 JPY
セール 売り切れ
税込

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2012/01/01

タイトル(英語): High Efficiency Mixing Chip with Liquid Flow Actuators Operated by Surface Acoustic Waves

著者名: 才木 常正(兵庫県立工業技術センター 環境・バイオ部/兵庫県立大学 高度産業科学技術研究所),内海 裕一(兵庫県立大学 高度産業科学技術研究所)

著者名(英語): Tsunemasa Saiki (Department of Ecological and Biological technologies, Hyogo Prefectural Institute of Technology/Laboratory of advanced Science and Technology for Industry, University of Hyogo), Yuichi Utsumi (Laboratory of advanced Science and Technology for Industry, University of Hyogo)

キーワード: 弾性表面波,液体,アクチュエータ,MEMS (微小電気機械システム),混合  surface acoustic wave,liquid,actuator,MEMS (Micro-Electro-Mechanical Systems),mixing

要約(英語): Surface acoustic wave (SAW) devices can be used as component parts for micro total analysis systems (μTASs), because the structures of these are very simple. We thus fabricated a mixing chip with liquid flow actuators operated only by the SAWs. The chip is mainly consisted of one Y-type flow channel, two pumps and one mixer. The pump is located at each upstream area of merging point of the flow channel, and the mixer is located at its downstream area. Incidentally, the flow actuators have interdigital transducers (IDTs) to generate the SAWs. The IDTs were fabricated by patterning Al/Cr on a LiNbO3 substrate, and the flow channel wall was made of epoxy-based negative resist SU-8. Using the mixing chip, we carried out a mixing experiment of two water solutions with different concentrations by using glycerin, and a chemical reaction experiment of luminol luminescence. Through the experimentations, it was found that the local and rapid mixing of continuous liquid flow was possible by using the SAW actuators, and the availability of our fabricated mixing chip as a reactor was demonstrated.

本誌: 電気学会論文誌C(電子・情報・システム部門誌) Vol.132 No.1 (2012) 特集:確率的最適化と機械学習の統計的設計と応用

本誌掲載ページ: 70-76 p

原稿種別: 論文/日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/132/1/132_1_70/_article/-char/ja/

販売タイプ
書籍サイズ
ページ数
詳細を表示する