光/超伝導変換デバイスの感度向上を目的とした極薄高温超伝導膜の作製法の研究

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2012/11/01

タイトル(英語): Fabrication of Very Thin High-Temperature-Superconducting Films Required for High-sensitivity Optics/Superconductivity Converters

著者名: 伊藤　大介（近畿大学大学院　生物理工学研究科），小谷　克己（近畿大学大学院　生物理工学研究科），三宅　智貴（近畿大学大学院　生物理工学研究科），西川　博昭（近畿大学大学院　生物理工学研究科），本津　茂樹（近畿大学大学院　生物理工学研究科），楠　正暢（近畿大学大学院　生物理工学研究科）

著者名(英語): Daisuke Ito (Graduate School of Biology Oriented Science and Technology, Kinki University), Katsumi Kotani (Graduate School of Biology Oriented Science and Technology, Kinki University), Tomoki Miyake (Graduate School of Biology Oriented Science and Technology, Kinki University), Hiroaki Nishikawa (Graduate School of Biology Oriented Science and Technology, Kinki University), Shigeki Hontsu (Graduate School of Biology Oriented Science and Technology, Kinki University), Masanobu Kusunoki (Graduate School of Biology Oriented Science and Technology, Kinki University)

キーワード: 光/超伝導変換，ナノデバイス，極薄高温超伝導薄膜，格子不整合　　optics/superconductivity converter，nano-device，very thin high-temperature-superconducting film，lattice mismatching

要約(英語): We studied a method to obtain superconductivity even in very thin films of YBa2Cu3Oy (YBCO). These thinner YBCO films will be able to be applied to optics/superconductivity (opt/super) converters with high optical sensitivity. Opt/super converters composed of YBCO nano-bridges or nano-wires require a low critical current that is determined by the film thickness. According to X-ray diffraction, critical temperature (Tc) and residual resistivity ratio for the substrates of MgO (100), SrTiO3 (100) and NdGaO3 (110), superconducting features are influenced by the lattice mismatching layer in YBCO closing to a hetero-epitaxy interface between YBCO and single crystal substrate. YBCO films with different thicknesses varying from 80 to 10nm were prepared on SrTiO3, using a suitable temperature. The values of Tc slightly decreased when reducing YBCO thickness from 80 to 20 nm, and then declined sharply at less than 20nm. It is considered that a layer in the beginning of deposition less than 20nm causes stress in the crystal lattice. The Tc of 20 nm YBCO film on SrTiO3 was 80.8 K. It can work above liquid N2 temperature.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.132 No.11 （2012） 特集：電気関係学会関西連合大会

本誌掲載ページ: 1722-1726 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/132/11/132_1722/_article/-char/ja/