鉛直振動による浮上を用いたインチワーム

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2012/12/01

タイトル(英語): An Inchworm Using Levitation Caused by Vertical Vibration

著者名: 鳥井　昭宏（愛知工業大学工学部），板津　佑樹（愛知工業大学工学部），西尾　光広（愛知工業大学工学部），植田　明照（愛知工業大学工学部），道木　加絵（愛知工業大学工学部）

著者名(英語): Akihiro Torii (Faculty of Engineering, Aichi Institute of Technology), Yuki Itatsu (Faculty of Engineering, Aichi Institute of Technology), Mitsuhiro Nishio (Faculty of Engineering, Aichi Institute of Technology), Akiteru Ueda (Faculty of Engineering, Aichi Institute of Technology), Kae Doki (Faculty of Engineering, Aichi Institute of Technology)

キーワード: インチワーム，位置決め，マイクロアクチュエータ，圧電アクチュエータ　　inchworm，positioning，micro actuator，piezoelectric actuator

要約(英語): We propose an inchworm-type microactuator which uses levitation caused by vertical vibration. The vertical vibration is generated by a piezoelectric actuator. The inchworm usually consists of thrust elements and clamp elements. The proposed inchworm-type microactuator however does not use any clamp elements. Three levitation elements are connected with two thrust elements which are stacked-type piezoelectric actuators. The levigation element consists of a mass, a piezoelectric actuator and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, and eliminates the friction. By controlling the phase of the horizontal and vertical piezoelectric actuators, the inchworm moves in the linear directions. The levitation height and the position of the inchworm are measured, and some experimental results show the feasibility of the proposed inchworm. The mechanism described in this paper is effective in a precise positioning system in a cleanroom.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.132 No.12 （2012） 特集：電気関係学会東海支部連合大会

本誌掲載ページ: 1919-1924 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/132/12/132_1919/_article/-char/ja/