半導体レーザの自己結合効果を利用した微小変位計測システム

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2014/11/01

タイトル(英語): Micro Displacement Measurement System using Self-coupling Effect of Semiconductor Laser

著者名: 森　雅和（愛知工業大学），五島　敬史郎（愛知工業大学），津田　紀生（愛知工業大学），名和　靖彦（愛知工科大学），山田　諄（愛知工業大学）

著者名(英語): Masakazu Mori (Aichi Institute of Technology), Keishiro Goshima (Aichi Institute of Technology), Norio Tsuda (Aichi Institute of Technology), Yasuhiko Nawa (Aichi University of Technology), Jun Yamada (Aichi Institute of Technology)

キーワード: 自己結合効果，変位センサ，半導体レーザ　　Self-coupling effect，Displacement sensor，Semiconductor Laser

要約(英語): Recently, a line width of integrated circuit has been reduced to tens of nm and a demand for compact micro displacement measurement sensors in the manufacturing process increases. A laser interferometer is used as a conventional method of detecting a micro displacement, but some disadvantages; a weakness for external vibration, difficulties with optical alignment and so on. Then we proposed a compact micro displacement measurement system, which is proof against an external vibration and can detect a micro displacement without an external interferometer, by making use of the self coupling effect of the semiconductor laser. In this sensor system, the sensor head is movable, and continuously vibrates with small amplitude. The sensor head is controlled so that the vibration signal has a maximum. The displacement of target is measured from that of sensor head. It is confirmed that this system can be measured with a resolution of tens of nanometers to several micrometers.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.134 No.11 （2014） 特集Ⅰ：電気関係学会関西連合大会　特集Ⅱ：国際会議ヒューマナイズド　システム2013

本誌掲載ページ: 1684-1689 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/134/11/134_1684/_article/-char/ja/