鉛直振動による浮上を用いた3自由度インチワーム

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2014/11/01

タイトル(英語): A 3-DOF Inchworm Using Levitation Caused by Vertical Vibration

著者名: 鳥井　昭宏（愛知工業大学工学部），西尾　光広（愛知工業大学工学部），道木　加絵（愛知工業大学工学部），植田　明照（愛知工業大学工学部）

著者名(英語): Akihiro Torii (Faculty of Engineering, Aichi Institute of Technology), Mitsuhiro Nishio (Faculty of Engineering, Aichi Institute of Technology), Kae Doki (Faculty of Engineering, Aichi Institute of Technology), Akiteru Ueda (Faculty of Engineering, Aichi Institute of Technology)

キーワード: インチワーム，位置決め，マイクロアクチュエータ，圧電アクチュエータ　　inchworm，positioning，micro actuator，piezoelectric actuator

要約(英語): We propose a 3-DOF inchworm-type microactuator which uses levitation caused by vertical vibration. The vertical vibration is generated by a piezoelectric actuator. The inchworm usually consists of thrust elements and clamp elements. The proposed inchworm however does not use any clamp elements. Four levitation elements are connected with four thrust elements which are stacked-type piezoelectric actuators. The levitation element consists of a mass, a piezoelectric actuator and a plate. The vertical vibration of the piezoelectric actuator lifts the levitation elements, and eliminates the friction. By controlling the order of the deformation of the horizontal piezoelectric actuators and the vibration of the vertical piezoelectric actuators, the inchworm moves in the linear and rotational directions. The levitation height and the linear and rotational displacement of the inchworm were measured. Experimental results show the feasibility of the proposed 3-DOF inchworm. The mechanism described in this paper is effective in a precise positioning system in a cleanroom.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.134 No.11 （2014） 特集Ⅰ：電気関係学会関西連合大会　特集Ⅱ：国際会議ヒューマナイズド　システム2013

本誌掲載ページ: 1716-1723 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/134/11/134_1716/_article/-char/ja/