二次元分布密度に基づく設備の異常関連センサ特定技術

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2015/06/01

タイトル(英語): Anomaly-related Sensor Determination Method for Equipment Based on 2-Dimensional Distribution Densities

著者名: 渋谷　久恵（（株）日立製作所 横浜研究所），前田　俊二（広島工業大学工学部）

著者名(英語): Hisae Shibuya (Yokohama Research Laboratory, Hitachi, Ltd.), Shunji Maeda (Faculty of Engineering, Hiroshima Institute of Technology)

キーワード: 設備監視，異常検知，時系列データ，局所部分空間法，異常関連センサ特定　　Equipment Monitoring，Anomaly Detection，Time-series Data，Local Subspace Classifier，Anomaly-related Sensor Determination

要約(英語): For the purpose of support of action decision after anomaly detection, anomaly-related sensor determination method has been developed. In this method, 2-dimensional distribution densities of normal data for every pair of sensors are obtained beforehand, and the pairs of sensors on which the distribution of anomaly data is apart from that of normal data are automatically searched. To find such sensors, “isolation index” is calculated for each sensor by utilizing image processing. The proposed method was evaluated using real data of generators and semiconductor manufacturing equipment. It was confirmed that sensors related with each detected anomaly can be determined correctly. Anomaly phenomena such as a timing gap between sensor signals in transition, a break of synchronism of sensor signals and so on was recognized by investigating sensor signals determined as anomaly-related sensors.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.135 No.6 （2015） 特集：データからの知識発見とその応用

本誌掲載ページ: 611-618 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/135/6/135_611/_article/-char/ja/