SEM画像復元における劣化関数推定技術

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2017/12/01

タイトル(英語): PSF Estimation Technique for SEM Image Restoration

著者名: 宮本　敦（（株）日立製作所研究開発グループ），中平　健治（玉川大学 量子情報科学研究所）

著者名(英語): Atsushi Miyamoto (Hitachi, Ltd., Research & Development Group), Kenji NAKAHIRA (Tamagawa University, Quantum ICT Research Institute)

キーワード: 画像復元，走査電子顕微鏡，点広がり関数，ブラインドデコンボリューション，画像分解能　　image restoration，scanning electron microscope，point spread function，blind deconvolution，image resolution

要約(英語): In the semiconductor device manufacturing there has been a pressing need for inspection and measurement by using high-resolution images of scanning electron microscopes (SEMs). The SEM spatial resolution is mainly determined by the beam spot size at the specimen's surface and the spreading of the beam electrons in the specimen. Image restoration sharpens an observed image by the process of removing blur, which is represented by a point spread function (PSF), from the image. In this paper we address the problem of identifying the parameter of the PSF, the so-called blind deconvolution problem. The proposed method estimates the parameter from both the Fourier spectrum of the observed image and the diameter of the electron beam calculated by electro-optics simulator. Extensive experiments on real image data indicate significant improvements in image quality compared with conventional methods. The estimation error of the PSF parameter by the proposed method was about half that of the conventional one.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.137 No.12 （2017） 特集Ⅰ：電気・電子・情報関係学会東海支部連合大会　特集Ⅱ：国際会議ICESS2016

本誌掲載ページ: 1669-1675 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/137/12/137_1669/_article/-char/ja/