ミリ波円筒空洞共振器を用いた低εr誘電体フィルムの複素誘電率測定法

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2018/02/01

タイトル(英語): Complex Permittivity Measurement Method for a Dielectric Film with Low εr using a Millimeter-wave Circular Empty Cavity Resonator

著者名: 清水　隆志（宇都宮大学　大学院工学研究科），土屋　広樹（宇都宮大学　大学院工学研究科），古神　義則（宇都宮大学　大学院工学研究科）

著者名(英語): Takashi Shimizu (Graduate School of Engineering, Utsunomiya University), Hiroki Tsuchiya (Graduate School of Engineering, Utsunomiya University), Yoshinori Kogami (Graduate School of Engineering, Utsunomiya University)

キーワード: 複素誘電率，空洞共振器法，誘電体フィルム，ミリ波　　Complex permittivity，Cavity resonator method，Dielectric film，Millimeter-wave

要約(英語): Next generation millimeter wave wireless devices with low profile are required. Moreover, thin dielectric substrates and low εr packaging materials are developed actively in order to realize such devices. Therefore, a development of a complex permittivity evaluation technique for low εr dielectric films in millimeter wave frequency bands is extremely expected. We focus on a circular cavity resonator which is attached conductor plate to circular cylinder for the cut-off circular waveguide method. We investigated important points for low εr dielectric film measurements using the circular cavity resonator. Complex permittivity of five plastic wrap films are measured at 60-GHz band to verify the usefulness for the proposed method. As a result, it is verified that it can be applied till thickness of 10 μm when resonator parameters of the ”real” empty cavity are measured accurately.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.138 No.2 （2018） 特集：電磁波応用を加速するための高周波回路・計測・システム技術

本誌掲載ページ: 129-135 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/138/2/138_129/_article/-char/ja/