グリオキシル酸コバルト錯体の調製とフェムト秒レーザパルス照射によるコバルト析出

カテゴリ: 論文誌(論文単位)

グループ名: 【C】電子・情報・システム部門

発行日: 2022/04/01

タイトル(英語): Cobalt Precipitation from Glyoxylic Acid Cobalt Complex by Irradiating Femtosecond Laser Pulses

著者名: 溝尻　瑞枝（長岡技術科学大学），中谷　光（長岡技術科学大学），大石　知司（芝浦工業大学）

著者名(英語): Mizue Mizoshiri (Nagaoka University of Technology), Hikaru Nakatani (Nagaoka University of Technology), Tomoji Ohishi (Shibaura Institute of Technology)

キーワード: グリオキシル酸Co錯体，フェムト秒レーザ，光熱還元，Coパターン　　glyoxylic acid Co complex，femtosecond laser，thermochemical reduction，Co pattern

要約(英語): Co patterns were fabricated by using femtosecond laser pulse-induced thermochemical reduction of glyoxylic acid Co complex. Glyoxylic acid Co complex was synthesized by mixing CoSO4・7H2O and glyoxylic acid, following that the complex was dissolved in 2-aminoethanol/ethanol. Femtosecond laser pulses were focused and irradiated to the glyoxylic acid Co complex films spin-coated on glass substrates to form patterns. The minimum line width was 4 μm, which was larger than the focal spot diameter, indicating that the precipitation was induced by thermochemical reduction. The crystal structures of the patterns which were fabricated at high scanning speed, 10 and 20 mm/s, exhibited Co(fcc), suggesting that the precipitated Co nanoparticles from glyoxylic acid Co complex were sintered without the phase transition to Co(hcp). In contrast, CoO patterns were formed at low scanning speed, 1 mm/s. These results suggested that precipitated Co was oxidized by ambient oxygen in air by irradiating excess laser pulse energy. The metal Co direct writing technique is useful for printing of various microdevices.

本誌: 電気学会論文誌C（電子・情報・システム部門誌） Vol.142 No.4 （2022） 特集：持続可能な社会発展に貢献するスマートレーザプロセシング

本誌掲載ページ: 466-469 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejeiss/142/4/142_466/_article/-char/ja/