マイクロ波空洞共振器による微小導電性異物の検出特性

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2012/08/01

タイトル(英語): Small-Conductive-Particle Detection with a Microwave Resonant Cavity

著者名: 池田　誠人（九州大学 大学院総合理工学研究院／旭化成エンジニアリング（株）センシング応用技術部），間瀬　淳（九州大学 産学連携センター），内野　喜一郎（九州大学 大学院総合理工学研究院）

著者名(英語): Makoto Ikeda (Graduate School of Engineering Science, Kyushu University/Applied Sensing Technology Dept., Asahi Kasei Engineering Corp.), Atsushi Mase (Art, Science and Technology Center for Cooperative Research, Kyushu University), Kiichiro Uchino (Graduate School of Engineering Science, Kyushu University)

キーワード: 導電性異物検出，空洞共振器　　conductive particle detection，RF cavity

要約(英語): The recent miniaturization and increase in the complexity of electrical devices have increased the influence of impurities on the device performance, especially the influence of small conductive particles with a size on the order of micrometers. Therefore, the inspection of devices during the manufacturing process has become important. In this study, changes in the resonance properties of a microwave cavity were used to detect a metal particle. The decrease in the resonance frequency for a 100µm stainless steel sphere was about 0.1MHz, which was less than 1ppm of the resonance frequency used. This frequency change is too small to detect directly in the output of a particle detector. Transmission measurements (the scattering parameter S21) at a frequency that was few megahertz higher than the resonance frequency where the S21 changes sharply were used to magnify signal changes resulting from the introduction of a small conductive particle. A resonance frequency of 13.3GHz and a frequency 3MHz higher were chosen for obtaining measurements in the present study. By applying a filtering technique, it was shown that the minimum detectable sphere size is around 50µm. This sensitivity was experimentally shown to be uneven along the long axis of the cavity. The unevenness was related to the electrical field strength of the standing wave at the resonance frequency. For practical industrial inspection of devices, multiple frequencies should be employed in view of the present discussion.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.132 No.8 （2012）

本誌掲載ページ: 788-793 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/132/8/132_788/_article/-char/ja/