位置決め整定波形に基づくガルバノスキャナのパラメータ変動の実用的推定と補償

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2013/07/01

タイトル(英語): Practical Estimation and Compensation for Parameter Variations in Galvano Scanners Based on Position Settling Waveforms

著者名: 遠山　聡一（日立ビアメカニクス（株）），関　健太（名古屋工業大学 大学院 情報工学専攻），岩崎　誠（名古屋工業大学 大学院 情報工学専攻），平井　洋武（名古屋工業大学 大学院 情報工学専攻）

著者名(英語): Soichi Tohyama (Hitachi Via Mechanics, Ltd.), Kenta Seki (Department of Computer Science and Engineering, Nagoya Institute of Technology), Makoto Iwasaki (Department of Computer Science and Engineering, Nagoya Institute of Technology), Hiromu Hirai (Department of Computer Science and Engineering, Nagoya Institute of Technology)

キーワード: 高精度位置決め，整定波形，パラメータ変動，多重回帰分析，ロバスト性能　　high precision positioning，settling waveform，parameter variation，multiple regression analysis，robust property

要約(英語): This paper presents a practical compensation method for parameter variations of galvano scanners in laser drilling machines. In the galvano scanner, plant parameters, such as torque constant of motor, mechanical resonant frequencies, and viscous friction in mechanism, vary according to temperature rise and/or age-related deterioration. As a result, the positioning performance deteriorates owing to variations from the nominal condition. In this study, therefore, a practical estimation and compensation method for the variations is proposed in order to improve the settling performance, where fluctuations in settling waveforms are comparatively analyzed by a precise positioning simulator. Based on the analyses, the fluctuations are approximately expressed by simultaneous equations, while the parameters are identified by solving the equations using a multiple regression analysis. Then, a feedforward controller is redesigned with the identified parameters. The proposed compensation approach has been verified by numerical simulations and experiments using a positioning device for actual galvano scanners.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.133 No.7 （2013）

本誌掲載ページ: 729-737 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/133/7/133_729/_article/-char/ja/