Improvement of Bending Vibration Suppression Performance for Galvano Mirror by Self-Sensing Actuation

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門（英文）

発行日: 2014/01/01

タイトル(英語): Improvement of Bending Vibration Suppression Performance for Galvano Mirror by Self-Sensing Actuation

著者名: Kenta Seki (Nagoya Institute of Technology), Makoto Iwasaki (Nagoya Institute of Technology)

著者名(英語): Kenta Seki (Nagoya Institute of Technology), Makoto Iwasaki (Nagoya Institute of Technology)

キーワード: vibration suppression，self-sensing actuation，piezoelectric element，galvano mirror，decoupling compensation

要約(英語): This paper presents a method for suppressing the bending vibration of galvano mirrors used in laser positioning systems. Fast and highly precise positioning of the mirror is vitally important for these systems. Thus, the flatness of the mirror should be maintained to ensure highly precise laser positioning. However, mechanical resonant vibrations of the mirror, which are excited by the moment force during positioning, lead to residual vibrations after positioning; these vibrations degrade the flatness of the mirror and the laser manufacturing accuracy. In this paper, therefore, a vibration suppression method is proposed in which a piezoelectric element is mounted on the mirror so as to utilize the multifunctionality of the piezoelectric element by applying it as both actuator and sensor in the vibration suppression controller design. The applicability of the proposed approach to industrial galvano scanners has been verified by performing experiments with a prototype.

本誌: IEEJ Journal of Industry Applications Vol.3 No.1 （2014）Special Issue on Motion Control and its Related Technologies

本誌掲載ページ: 2014/10/17 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejjia/3/1/3_10/_article/-char/ja/