ガルバノスキャナにおける軸受性能低下による位置決め性能への影響分析手法

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2014/08/01

タイトル(英語): Analysis of Settling Response to Deterioration of Ball Bearings in Galvanometer Scanners

著者名: 松家　大介（(株) 日立製作所 日立研究所），岩崎　誠（名古屋工業大学 大学院 情報工学専攻）

著者名(英語): Daisuke Matsuka (Hitachi Research Laboratory, Hitachi, Ltd.), Makoto Iwasaki (Depaertment of Computer Science and Engineering, Nagoya Institute of Technology)

キーワード: 高速・高精度位置決め，プロニー解析法，転がり軸受，ガルバノスキャナ　　high-speed and precise positioning，Prony analysis method，ball bearing，galvanometer scanner

要約(英語): This paper presents a method for analyzing the settling response to the deterioration of ball bearings, such as fretting damage, of a galvanometer scanner. A galvanometer scanner is a type of swaying motor used in laser-drilling machines. It is able to position a laser at more than 2400 points per second with a positioning error of less than 3μm. Analysis of the settling response is important to the precise positioning of galvanometer scanners. The settling response of the galvanometer scanner was decoupled into each vibration-mode component through Prony analysis. This experimental modal analysis method was used to detect modal parameters from the time series data. The vibration modes from the pole-zero configuration of a closed-loop system where normalized frequencies was near the first torsion mode were caused by changing the frequency response characteristics of the controlled object. A galvanometer scanner with fretting damage to its ball bearings was analyzed using this method, and the relationship between the position error of the settling responses and the deterioration of the ball bearings was quantified by focusing on the initial amplitudes of the overdamping modes.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.134 No.8 （2014）

本誌掲載ページ: 776-783 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/134/8/134_776/_article/-char/ja/