コンタクトモードAFMを用いた試料表面形状と弾性特性の同時推定法の提案

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2014/12/01

タイトル(英語): Proposal for Simultaneous Estimation of Sample Surface Topography and Elasticity Utilizing Contact-Mode AFM

著者名: 渡辺　早紀矢（東京大学大学院 工学系研究科），藤本　博志（東京大学大学院 工学系研究科）

著者名(英語): Sakiya Watanabe (The University of Tokyo), Hiroshi Fujimoto (The University of Tokyo)

キーワード: 原子間力顕微鏡，弾性推定，表面形状オブザーバ，完全追従制御法　　atomic force microscope，elasticity estimation，surface topography observer，perfect tracking control

要約(英語): An atomic force microscope can be used to measure the surface topography of samples at the nano-scale. Because the cantilever maintains physical contact with the sample, it is also possible to measure the elasticity of samples in principle. However, compared with the advances of scanning performance, the technologies for measuring viscosity and elasticity are still underdeveloped. The proposed method measures the surface topography during the forward scan (FWS) and the elasticity during the backward scan (BWS). We also introduce a surface topography observer (STO) and perfect tracking control (PTC) in order to improve the measurement accuracy.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.134 No.12 （2014）

本誌掲載ページ: 982-988 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/134/12/134_982/_article/-char/ja/