原子間力オブザーバに基づく高速フォースカーブ測定

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2017/10/01

タイトル(英語): High-Speed Force Curve Measurement based on Atomic Force Observer

著者名: 延命　朋希（東京大学大学院工学系研究科），藤本　博志（東京大学大学院工学系研究科），堀　洋一（東京大学大学院工学系研究科）

著者名(英語): Tomoki Enmei (Graduate School of Frontier Sciences, The University of Tokyo), Hiroshi Fujimoto (Graduate School of Frontier Sciences, The University of Tokyo), Yoichi Hori (Graduate School of Frontier Sciences, The University of Tokyo)

キーワード: 原子間力顕微鏡，フォースカーブ測定，原子間力オブザーバ　　atomic force microscope，force curve measurement，atomic force observer

要約(英語): Atomic Force Microscope (AFM) is a scanning probe microscope with nanoscale resolution, and it is an indispensable device for nanotechnology. Since the AFM probe physically touches the sample surface, there are rising expectations for sample dynamics measurement. One common measurement mode is the force curve measurement. In the force curve measurement, the atomic force is detected by the spring constant of the cantilever. In high speed measurement, however, the cantilever oscillates at its resonance frequency and cannot detect the atomic force. This paper proposes novel methods to identify cantilever dynamics and to measure the force curve at high speed using atomic force observer (AFO). The effectiveness of the proposed measurement method is demonstrated by using simulations and experiments. Furthermore, the robustness of the AFO against modeling error and its convergence are discussed.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.137 No.10 （2017）

本誌掲載ページ: 753-759 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/137/10/137_753/_article/-char/ja/