静電容量検出に基づく圧電アクチュエータの位置センサレス制御

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2018/08/01

タイトル(英語): Position Sensorless Control of Piezoelectric Actuators based on Capacitance Detection

著者名: 野田　大輔（名古屋工業大学大学院工学研究科 電気・機械工学専攻），関　健太（名古屋工業大学大学院工学研究科 電気・機械工学専攻），岩崎　誠（名古屋工業大学大学院工学研究科 電気・機械工学専攻）

著者名(英語): Daisuke Noda (Nagoya Institute of Technology), Kenta Seki (Nagoya Institute of Technology), Makoto Iwasaki (Nagoya Institute of Technology)

キーワード: 圧電アクチュエータ，位置制御，センサレス，静電容量検出，離散フーリエ変換_x000D_　　piezoelectric actuators，position control，sensorless，capacitance detection，discrete Fourier transform

要約(英語): This paper presents an approach for position sensorless control in piezoelectric actuators. To achieve high-precision positioning with a piezoelectric actuator, a feedback control system using a high-resolution position sensor should be used to mitigate nonlinearities and disturbances. Sensorless control is desirable to reduce the cost and space utilization in micro- and nano-positioning systems. In this paper, actuator position is estimated based on the capacitance of the actuator because the displacement is propotionate to the capacitance. To measure the capacitance, a reference voltage with a high frequency component is injected into the actuator. On the basis of the reference voltage and current, the capacitance is estimated through the discrete Fourier transform. The displacement of the actuator is calculated using the relationship between displacement and capacitance. The position feedback controller is designed based on the estimated displacement signal. The proposed sensorless control approach is verified by conducting experiments using a bimorph-type piezoelectric actuator.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.138 No.8 （2018）

本誌掲載ページ: 684-691 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/138/8/138_684/_article/-char/ja/