Dual-loop Controller Design Considering Robust Vibration Suppression in Piezo-actuated Stage Systems

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門（英文）

発行日: 2018/11/01

タイトル(英語): Dual-loop Controller Design Considering Robust Vibration Suppression in Piezo-actuated Stage Systems

著者名: Kenta Seki (Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology), Daisuke Noda (Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology), Makoto Iwasaki (Department of Electrical and Mechanical E

著者名(英語): Kenta Seki (Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology), Daisuke Noda (Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology), Makoto Iwasaki (Department of Electrical and Mechanical E

キーワード: high-precision positioning，vibration suppression，loop-shaping，robust property，piezo-actuated stages

要約(英語): This paper presents a controller design approach considering robust vibration suppression against resonant frequency variations in piezo-actuated systems. In piezo-actuated systems, the improvement of suppression performance with respect to external disturbances and nonlinearities such as hysteresis and creep by the expansion of feedback control bandwidth is indispensable for achieving high-precision positioning. The vibration suppression approach is a key technology for the expansion of bandwidth. From a practical point of view, a minor feedback loop including a simple compensator with a few parameters to increase the design freedom is added to the general feedback control system. In the minor-loop design, the reduction of sensitivity gain at around the resonant frequencies is considered to suppress the residual vibration of the references and disturbances, and the loop-shaping approach based on the frequency domain is adopted to provide an intuitive and practical design guideline. A major-loop for an augmented plant, including the minor-loop, is designed by considering the system stability, servo bandwidth, and settling performance. The proposed approach is verified by conducting experiments using a commercial piezo-actuated stage system.

本誌: IEEJ Journal of Industry Applications Vol.7 No.6 （2018）

本誌掲載ページ: 488-494 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejjia/7/6/7_488/_article/-char/ja/