High-speed Scanner with Nanometer Resolution Using a Hybrid Reluctance Force Actuator

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門（英文）

発行日: 2019/03/01

タイトル(英語): High-speed Scanner with Nanometer Resolution Using a Hybrid Reluctance Force Actuator

著者名: Shingo Ito (Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN), TU Wien), Stefan Troppmair (Automation and Control Institute (ACIN), TU Wien), Francesco Cigarini (Christian Doppl

著者名(英語): Shingo Ito (Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN), TU Wien), Stefan Troppmair (Automation and Control Institute (ACIN), TU Wien), Francesco Cigarini (Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN), TU Wien), Georg Schitter (Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Automation and Control Institute (ACIN), TU Wien)

キーワード: high-precision actuators，hybrid reluctance actuator，nanopositioning，motion control

要約(英語): This paper proposes a high-precision, high-speed scanner using a hybrid reluctance actuator, which can be stronger than conventionally used comparable Lorentz force actuators. For compactness, its mover is guided by flexures and laterally moved by a hybrid reluctance actuator with a voltage amplifier. To reject disturbances such as thermal drift and hysteresis, the scanner is regulated by cascade control, for which parasitic resonances are damped partially mechanically. As a result, the closed-loop system realizes a high control bandwidth of 3.5kHz and a high positioning resolution of 0.8nm at a static point. For high-speed scanning motion, modeling-free inversion-based iterative control (IIC) is proposed to be combined with the cascade control as the scanner's feedforward controller. Experiments demonstrate that the scanner with the cascade control realizes a 2μm triangular motion at 400Hz with a tracking error of 101nm, and the modeling-free IIC successfully decreases this relatively large error by a factor of 26 to 3.8nm. Consequently, this paper clearly demonstrates that the proposed scanner with the hybrid reluctance actuator can realize high-precision, high-speed scanning motion.

本誌: IEEJ Journal of Industry Applications Vol.8 No.2 （2019） Special Issue Ⅰ on “Motion Control and its Related Technologies”　Special Issue Ⅱ on “IPEC-Niigata 2018”

本誌掲載ページ: 170-176 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejjia/8/2/8_170/_article/-char/ja/