Perfect Tracking Control Considering Generalized Controllability Indices and Application for High-Precision Stage in Translation and Pitching

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門（英文）

発行日: 2019/03/01

タイトル(英語): Perfect Tracking Control Considering Generalized Controllability Indices and Application for High-Precision Stage in Translation and Pitching

著者名: Masahiro Mae (The University of Tokyo), Wataru Ohnishi (The University of Tokyo), Hiroshi Fujimoto (The University of Tokyo), Yoichi Hori (The University of Tokyo)

著者名(英語): Masahiro Mae (The University of Tokyo), Wataru Ohnishi (The University of Tokyo), Hiroshi Fujimoto (The University of Tokyo), Yoichi Hori (The University of Tokyo)

キーワード: multirate feedforward，multi-input multi-output system，high-precision stage

要約(英語): High-precision stages are widely used for manufacturing semiconductors and flat panels. These high-precision stages have become multi-input multi-output (MIMO) systems with six-degrees-of-freedom (DOF); hence, the coupling between the translation and pitching motion deteriorates the control performance. This study proposes the multirate feedforward control for MIMO systems and applies it to these high-precision stages. The multirate feedforward control designs the stable inversion for the unstable discretization zero problem. In addition, the design of the MIMO multirate feedforward controllers has a degree of freedom to design the B matrix according to the selection of the generalized controllability indices. In conventional control methods such as precompensated decoupling controllers, it is theoretically impossible to achieve perfect tracking because unstable discretization zeros are generated. In this study, the proposed method is applied to the translation and pitching motion of a high-precision stage, and it achieves perfect tracking in the simulation. The effectiveness of the proposed method is verified experimentally.

本誌: IEEJ Journal of Industry Applications Vol.8 No.2 （2019） Special Issue Ⅰ on “Motion Control and its Related Technologies”　Special Issue Ⅱ on “IPEC-Niigata 2018”

本誌掲載ページ: 263-270 p

原稿種別: 論文／英語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejjia/8/2/8_263/_article/-char/ja/