冗長アクチュエータの自由度を活かした回転中心・重心点ハイブリッド駆動による精密位置決めステージの非干渉化制御法

カテゴリ: 論文誌(論文単位)

グループ名: 【D】産業応用部門

発行日: 2019/05/01

タイトル(英語): Decoupling Control of High-Precision Positioning Stages by using a Center of Rotation and Center of Gravity Hybrid-Driven Method with Additional Actuators

著者名: 大西　亘（東京大学大学院工学系研究科），藤本　博志（東京大学大学院工学系研究科），坂田　晃一（（株）ニコン），鈴木　一弘（（株）ニコン）

著者名(英語): Wataru Ohnishi (Graduate School of Engineering, The University of Tokyo), Hiroshi Fujimoto (Graduate School of Engineering, The University of Tokyo), Koichi Sakata (Nikon Corporation), Kazuhiro Suzuki (Nikon Corporation)

キーワード: 冗長アクチュエータ，非干渉化，機構と制御の統合設計，超精密位置決めステージ　　additional actuators，decoupling control，integrated design of mechanism and control，high-precision positioning stage

要約(英語): A high-precision positioning stage is an important apparatus for high-precision industries. Generally, the stages have 6-degrees of freedom (6 DOF: x, y, z, θx, θy, and θz) to control. However, coupling forces between the axes deteriorate the control performance. To address this problem, this paper proposes a decoupling method that utilizes a high-precision positioning stage with additional actuators. According to a model that considers the misalignment among the Center of Gravity (CoG), the Center of Rotation (CoR), the actuation point, and the measurement point, the coupling characteristics from the translational force to the angle can be changed by varying the height of the actuation point. The model indicates that a “CoR-driven method” can suppress the coupling in the low-frequency range and a “CoG-driven method” can suppress the coupling in the high-frequency range. This paper proposes a “CoR and CoG hybrid-driven method” using complementary filters to place the actuation point at the CoR and CoG in the low and high-frequency ranges, respectively. The effectiveness of the proposed method is verified by experiments using a 6 DOF high-precision positioning stage.

本誌: 電気学会論文誌D（産業応用部門誌） Vol.139 No.5 （2019） 特集：平成30年産業応用部門大会

本誌掲載ページ: 480-487 p

原稿種別: 論文／日本語

電子版へのリンク: https://www.jstage.jst.go.jp/article/ieejias/139/5/139_480/_article/-char/ja/